From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis

Catana, GabrielaGabrielaCatanaDe Backker, KrisKrisDe Backker2021-10-152021-10-152003-10https://imec-publications.be/handle/20.500.12860/7291From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysisProceedings paper