Sun, L.L.SunDefranoux, C.C.DefranouxStehlé, J.L.J.L.StehléBoher, P.P.BoherEvrard, P.P.EvrardBellandi, E.E.BellandiBender, HugoHugoBender2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9652Characterization of high-k dielectrics by combined spectroscopic ellipsometry (SE) and x-ray reflectometry (XRR)Proceedings paper