Gate induced floating body effects in TiN/SiON and TiN/HfO2 triple gate SOI FinFETs

Rafi, J.M.J.M.RafiSimoen, EddyEddySimoenMercha, AbdelkarimAbdelkarimMerchaCollaert, NadineNadineCollaertHayama, K.K.HayamaCampabadal, F.F.CampabadalClaeys, CorCorClaeys2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12749Gate induced floating body effects in TiN/SiON and TiN/HfO2 triple gate SOI FinFETsJournal article