Vereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsXu, KaidongKaidongXuLux, MarcelMarcelLuxVos, RitaRitaVosMertens, PaulPaulMertensLoper, S.S.LoperGrothe, P.P.Grothe2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8366Evaluation of megasonic cleaning for particle removal efficiency and damagingOral presentation