Claessens, NielsNielsClaessensCouture, PierrePierreCoutureEngland, JonathanJonathanEnglandVos, RitaRitaVosHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorstVantomme, AndreAndreVantommeMeersschaut, JohanJohanMeersschaut2022-08-292022-07-102022-07-232022-08-2920222468-0230WOS:000816918800003https://imec-publications.be/handle/20.500.12860/40105Ensemble RBS: Probing the compositional profile of 3D microscale structuresJournal article10.1016/j.surfin.2022.102101WOS:000816918800003ION-BEAM ANALYSIS