Velenis, DimitriosDimitriosVelenisDetalle, MikaelMikaelDetalleMarinissen, Erik JanErik JanMarinissenBeyne, EricEricBeyne2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23312Si Interposer build-up options and impact on 3D system costProceedings paper