AlGaN-on-Si-based 10-um pixel-to-pixel pitch hybrid imagers for the EUV range

Malinowski, PawelPawelMalinowskiDuboz, Jean-YvesJean-YvesDubozDe Moor, PietPietDe MoorJohn, JoachimJoachimJohnMinoglou, KikiKikiMinoglouSrivastava, PuneetPuneetSrivastavaSemond, FabriceFabriceSemondFrayssinet, EricEricFrayssinetGiordanengo, BorisBorisGiordanengoBenMoussa, AliAliBenMoussaKroth, UdoUdoKrothGottwald, AlexanderAlexanderGottwaldLaubis, ChristianChristianLaubisMertens, RobertRobertMertensVan Hoof, ChrisChrisVan Hoof2021-10-192021-10-1920110741-3106https://imec-publications.be/handle/20.500.12860/19365AlGaN-on-Si-based 10-um pixel-to-pixel pitch hybrid imagers for the EUV rangeJournal articlehttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5993494