Poliakov, PavelPavelPoliakovBlomme, PieterPieterBlommeVaglio Pret, AlessandroAlessandroVaglio PretMiranda Corbalan, MiguelMiguelMiranda CorbalanVan Houdt, JanJanVan HoudtDehaene, WimWimDehaene2021-10-192021-10-192011-06https://imec-publications.be/handle/20.500.12860/19585Bridging lithography processes with NAND flash ECC complexityProceedings paper