Quantitative observation of Ge-segregation during the Si-passivation of Ge-surfaces.

Vandervorst, WilfriedWilfriedVandervorstKoelling, SebastianSebastianKoellingVincent, BenjaminBenjaminVincentCaymax, MattyMattyCaymaxDouhard, BastienBastienDouhard2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18225Quantitative observation of Ge-segregation during the Si-passivation of Ge-surfaces.Oral presentation