Goethals, MiekeMiekeGoethalsPollers, IngridIngridPollersVan Roey, FriedaFriedaVan RoeySugihara, TakashiTakashiSugiharaRonse, KurtKurtRonseHeskamp, B.B.HeskampDavies, G.G.DaviesGehoel-van Ansem, W.W.Gehoel-van AnsemPaniez, P.P.PaniezTemerson, T. M.T. M.TemersonHien, S.S.HienMortini, B.B.MortiniRomeo, C.C.Romeo2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2587Lithographic performance of 193 nm resistProceedings paper