Shang, XiaobingXiaobingShangJoshi, PankajPankajJoshiTan, Jin-YiJin-YiTanDe Smet, JelleJelleDe SmetCuypers, DieterDieterCuypersBaghdasaryan, TigranTigranBaghdasaryanVervaeke, MichaelMichaelVervaekeThienpont, HugoHugoThienpontDe Smet, HerbertHerbertDe Smet2021-10-232021-10-2320160022-3727https://imec-publications.be/handle/20.500.12860/27293Journal articlehttp://iopscience.iop.org/article/10.1088/0022-3727/49/16/165101/pdf