Kissinger, G.G.KissingerVanhellemont, JanJanVanhellemontClaeys, CorCorClaeysRichter, H.H.Richter2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1299Observation of stacking faults and prismatic punching systems in silicon by light scattering tomographyJournal article