Efficient procedure for capacitance matrix calculation of multilayer VLSI interconnects using quasi-static analysis and Fourier series approach

Ymeri, HassanHassanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaex2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7089Efficient procedure for capacitance matrix calculation of multilayer VLSI interconnects using quasi-static analysis and Fourier series approachJournal article