Zotovich, A.A.ZotovichKrishtab, MikhailMikhailKrishtabLazzarino, FredericFredericLazzarinoBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24899The chemistry screening for ultra low-k dielectrics plasma etchingProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2086463