Surdeanu, RaduRaduSurdeanuPawlak, BartekBartekPawlakLindsay, RichardRichardLindsayVan Dal, MarkMarkVan DalDoornbos, GerbenGerbenDoornbosDachs, C.J.J.C.J.J.DachsPonomarev, YouriYouriPonomarevLoo, JosineJosineLooCubaynes, FlorenceFlorenceCubaynesHenson, KirklenKirklenHensonVerheijen, M.A.M.A.VerheijenKaiser, M.M.KaiserPagès, XavierXavierPagèsStolk, PeterPeterStolkJurczak, GosiaGosiaJurczak2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9655Advanced PMOS device architecture for highly-doped ultra-shallow junctionsJournal article