Simulation of the impact of the gate curvature on the performance of 3D cylindrical SONOS

Arreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschBreuil, LaurentLaurentBreuilVan Houdt, JanJanVan Houdt2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16671Simulation of the impact of the gate curvature on the performance of 3D cylindrical SONOSMeeting abstract