Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannDe Gendt, StefanStefanDe GendtVan Bael, MarliesMarliesVan Bael2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17224Preparation and properties of ultrathin high-k dielectric films by aqueous chemical solution depositionOral presentation