Closed-loop modeling of silicon nanophotonics: from design to fabrication and back again

Bogaerts, WimWimBogaertsBradt, PaulPaulBradtVanholme, LievenLievenVanholmeBienstman, PeterPeterBienstmanBaets, RoelRoelBaets2021-10-172021-10-1720080306-8919https://imec-publications.be/handle/20.500.12860/13404Closed-loop modeling of silicon nanophotonics: from design to fabrication and back againJournal article