Calibration of physical resist models: methods, usability, and predictive power

Klostermann, U.U.KlostermannMülders, T.T.MüldersPonomarenco, D.D.PonomarencoSchmöller, T.T.SchmöllerVan de Kerkhove, JeroenJeroenVan de KerkhoveDe Bisschop, PeterPeterDe Bisschop2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15608Calibration of physical resist models: methods, usability, and predictive powerJournal article