Mallik, AwadeshAwadeshMallikKrishnamurthy, GiridharanGiridharanKrishnamurthyShih, Wen-ChingWen-ChingShihPobedinskas, PauliusPauliusPobedinskasD'Haen, JanJanD'HaenHaenen, KenKenHaenen2024-11-182024-08-302024-11-1820242694-1112WOS:001296876600001https://imec-publications.be/handle/20.500.12860/44386Enhanced etching of GaN with N2 gas addition during CVD diamond growthJournal article10.1080/26941112.2024.2393817WOS:001296876600001SPECTROSCOPYDEPOSITIONCARBON