Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenCallewaert, SvenSvenCallewaert2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5782Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopyProceedings paper