Structured Illumination Microscopy Based on Silicon Nitride Photonic Integrated Circuits

Deng, QingzhongQingzhongDengArisev, OngunOngunArisevKouznetsov, DmitryDmitryKouznetsovMahmud Ul Hasan, MDMDMahmud Ul HasanVos, RitaRitaVosVan Dorpe, PolPolVan DorpeVerellen, NielsNielsVerellen2022-01-242021-11-022022-01-242020naWOS:000698627100395https://imec-publications.be/handle/20.500.12860/37478Structured Illumination Microscopy Based on Silicon Nitride Photonic Integrated CircuitsProceedings paper978-1-943580-82-8WOS:000698627100395