Observation of vacancy clustering in FZ-Si crystals during in situ electron irradiation in a high voltage electron microscope

Fedina, L.L.FedinaVan Landuyt, J.J.Van LanduytVanhellemont, JanJanVanhellemontAseev, A. L.A. L.Aseev2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1220Observation of vacancy clustering in FZ-Si crystals during in situ electron irradiation in a high voltage electron microscopeJournal article