Formation of misfit dislocations at the thin strained Si/strain relaxed buffer interface

Loo, RogerRogerLooDelhougne, RomainRomainDelhougneCaymax, MattyMattyCaymaxRies, MikeMikeRies2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/10801Formation of misfit dislocations at the thin strained Si/strain relaxed buffer interfaceJournal article