Insights into Scaled Logic Devices Connected from Both Wafer Sides

Veloso, AnabelaAnabelaVelosoEneman, GeertGeertEnemanMatagne, PhilippePhilippeMatagneVermeersch, BjornBjornVermeerschJourdain, AnneAnneJourdainArimura, HiroakiHiroakiArimuraO'Sullivan, BarryBarryO'SullivanChen, RongmeiRongmeiChenDe Keersgieter, AnAnDe KeersgieterSimoen, EddyEddySimoenRadisic, DunjaDunjaRadisicOniki, YusukeYusukeOnikiLafitte, A.A.LafitteBrus, StephanStephanBrusBeyne, EricEricBeyneDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2023-06-012023-05-252023-06-0120222380-9248WOS:000968800700177https://imec-publications.be/handle/20.500.12860/41629Insights into Scaled Logic Devices Connected from Both Wafer SidesProceedings paper10.1109/IEDM45625.2022.10019521978-1-6654-8959-1WOS:000968800700177