Assessment of STI dry etch process variability by means of dynamic time warping technique

Milenin, AlexeyAlexeyMileninChan, BTBTChanLazzarino, FredericFredericLazzarino2023-07-072023-04-032023-07-0720230021-4922WOS:000949966400001https://imec-publications.be/handle/20.500.12860/41418Assessment of STI dry etch process variability by means of dynamic time warping techniqueJournal article10.35848/1347-4065/acbbd6WOS:000949966400001