Zhao, ChaoChaoZhaoCosnier, V.V.CosnierChen, P.J.P.J.ChenRichard, OlivierOlivierRichardRoebben, G.G.RoebbenMaes, JanJanMaesVan Elshocht, SvenSvenVan ElshochtBender, HugoHugoBenderYoung, EdwardEdwardYoungVan der Biest, O.O.Van der BiestCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8439Thermal stability of high k layersProceedings paper