Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless deposition

Dictus, DriesDriesDictusDordi, Y.Y.DordiGurer, E.E.GurerKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanovCarbonell, LaureLaureCarbonellvan der Veen, MarleenMarleenvan der VeenEl-Mekki, ZaidZaidEl-MekkiTokei, ZsoltZsoltTokei2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22269Development of a new metallization scheme for making nanoscale interconnects based on plasma-functionalization and electroless depositionMeeting abstract