Influence of oxygen desorption on in-situ analysis of the surface composition during O2+ bombardment of Si

Janssens, TomTomJanssensVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12358Influence of oxygen desorption on in-situ analysis of the surface composition during O2+ bombardment of SiJournal article