Vermang, BartBartVermangRothschild, AudeAudeRothschildKenis, KarineKarineKenisWostyn, KurtKurtWostynBearda, TwanTwanBeardaRacz, A.A.RaczLoozen, XavierXavierLoozenMertens, PaulPaulMertensPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-2020121662-9779https://imec-publications.be/handle/20.500.12860/21791Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3Journal article