Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches

Favia, PaolaPaolaFaviaWitters, LiesbethLiesbethWittersMitard, JeromeJeromeMitardCollaert, NadineNadineCollaertBender, HugoHugoBender2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23810Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenchesProceedings paper