Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm node

Bekaert, JoostJoostBekaertVan Look, LieveLieveVan LookTruffert, VincentVincentTruffertLazzarino, FredericFredericLazzarinoVandenberghe, GeertGeertVandenbergheReybrouck, MarioMarioReybrouckTarutani, ShinjiShinjiTarutani2021-10-182021-10-182010-121537-1646https://imec-publications.be/handle/20.500.12860/16725Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm nodeJournal article