Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications

Ghorbani, LeilaLeilaGhorbaniKundu, ShreyaShreyaKunduLazzarino, FredericFredericLazzarinoDe Gendt, StefanStefanDe Gendt2025-05-142023-08-232025-05-142023-102151-2043https://imec-publications.be/handle/20.500.12860/42387Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory ApplicationsMeeting abstract10.1149/MA2023-02161164mtgabs