The phosphorous level fine structure in homoepitaxial n-type CVD diamond

Haenen, KenKenHaenenNesladek, MilosMilosNesladekDe Schepper, LucLucDe SchepperKravets, R.R.KravetsVanecek, M.M.VanecekKoizumi, S.S.Koizumi2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8992The phosphorous level fine structure in homoepitaxial n-type CVD diamondJournal article