Jang, DoyoungDoyoungJangYakimets, DmitryDmitryYakimetsEneman, GeertGeertEnemanSchuddinck, PieterPieterSchuddinckGarcia Bardon, MarieMarieGarcia BardonRaghavan, PraveenPraveenRaghavanSpessot, AlessioAlessioSpessotVerkest, DiederikDiederikVerkestMocuta, AndaAndaMocuta2021-10-242021-10-2420170018-9383https://imec-publications.be/handle/20.500.12860/28585Device exploration of nanosheet transistors for sub-7nm technology nodeJournal articlehttp://ieeexplore.ieee.org/document/7915711/