Felch, S.B.S.B.FelchCollart, E.E.CollartParihar, V.V.PariharThirupapulyur, S.S.ThirupapulyurSchreutelkamp, R.R.SchreutelkampPawlak, BartekBartekPawlakHoffmann, Thomas Y.Thomas Y.HoffmannSeveri, SimoneSimoneSeveriEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorstNoda, TaijiTaijiNoda2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/13717Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealingJournal article