A consistent model for oxide trap profiling with the trap spectroscopy by charge injection and sensing (TSCIS) technique

Cho, Moon JuMoon JuChoDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselGovoreanu, BogdanBogdanGovoreanuKaczer, BenBenKaczerZahid, MohammedMohammedZahidSimoen, EddyEddySimoenArreghini, AntonioAntonioArreghiniJurczak, GosiaGosiaJurczakVan Houdt, JanJanVan HoudtGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-1820100038-1101https://imec-publications.be/handle/20.500.12860/16867A consistent model for oxide trap profiling with the trap spectroscopy by charge injection and sensing (TSCIS) techniqueJournal article