Oxygen Defect Stability in Amorphous, C-Axis Aligned, and Spinel IGZO

van Setten, MichielMichielvan SettenDekkers, HaroldHaroldDekkersKljucar, LukaLukaKljucarMitard, JeromeJeromeMitardPashartis, ChristopherChristopherPashartisSubhechha, SubhaliSubhaliSubhechhaRassoul, NouredineNouredineRassoulDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKarPourtois, GeoffreyGeoffreyPourtois2022-04-252021-11-022022-04-042022-04-2520212637-6113WOS:000703541500033https://imec-publications.be/handle/20.500.12860/37491Oxygen Defect Stability in Amorphous, C-Axis Aligned, and Spinel IGZOJournal article10.1021/acsaelm.1c00553WOS:000703541500033THIN-FILMA-IGZOPSEUDOPOTENTIALSSYSTEMMATRIX