Granata, StefanoStefanoGranataMarchegiani, AlessioAlessioMarchegianiBearda, TwanTwanBeardaTous, LoicLoicTousCheyns, DavidDavidCheynsAbdulraheem, YaserYaserAbdulraheemGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikMertens, RobertRobertMertensPoortmans, JefJefPoortmans2021-10-222021-10-2220151862-6300https://imec-publications.be/handle/20.500.12860/25335Role of O2 radicals on silicone plasma treatments for surface passivation of wafers bonded to glassJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201431945/abstract