Ramezani, MalihehMalihehRamezaniCosemans, StefanStefanCosemansDe Coster, JeroenJeroenDe CosterRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusOsman, HarisHarisOsmanTilmans, HarrieHarrieTilmansSeveri, SimoneSimoneSeveriDe Meyer, KristinKristinDe Meyer2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24420Submicron three-terminal SiGe electromechanical ohmic relayProceedings paperhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6765836