Integration of capillary self-alignment for Face to Face micro bump bonding

Pham, NgaNgaPhamDaily, RobertRobertDailyArmini, SilviaSilviaArminiDelande, TinneTinneDelandePantouvaki, MariannaMariannaPantouvakiSoussan, PhilippePhilippeSoussan2021-10-212021-10-212013-09https://imec-publications.be/handle/20.500.12860/22931Integration of capillary self-alignment for Face to Face micro bump bondingProceedings paper