The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding

Deleu, JeroenJeroenDeleuBrijs, BertBertBrijsStorm, WolfgangWolfgangStormVandervorst, WilfriedWilfriedVandervorstDe Coster, WalterWalterDe Coster2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1192The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 floodingJournal article