High-Q on-chip inductors using thin-film wafer level packaging technology demonstrated on a 90nm RF-CMOS 5GHz VCO

Sun, XiaoXiaoSunLinten, DimitriDimitriLintenDupuis, OlivierOlivierDupuisCarchon, GeertGeertCarchonSoussan, PhilippePhilippeSoussanDecoutere, StefaanStefaanDecoutereDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/11293High-Q on-chip inductors using thin-film wafer level packaging technology demonstrated on a 90nm RF-CMOS 5GHz VCOProceedings paper