Loo, RogerRogerLooIacopi, FrancescaFrancescaIacopiVanherle, WendyWendyVanherleRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenTakeuchi, ShotaroShotaroTakeuchiNguyen, DuyDuyNguyenDoornbos, GerbenGerbenDoornbosDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15741SiGe tunnel field effect transistors: challenges for selective epitaxial growthMeeting abstract