Time-dependent dielectric breakdown on subnanometer EOT nMOS FinFETs

Feijoo, Pedro C.Pedro C.FeijooKauerauf, ThomasThomasKaueraufToledano Luque, MariaMariaToledano LuqueTogo, MitsuhiroMitsuhiroTogoSan Andrés, EnriqueEnriqueSan AndrésGroeseneken, GuidoGuidoGroeseneken2021-10-202021-10-2020121530-4388https://imec-publications.be/handle/20.500.12860/20674Time-dependent dielectric breakdown on subnanometer EOT nMOS FinFETsJournal article