Hermans, YannickYannickHermansHeil, TilmannTilmannHeilCapelli, RenzoRenzoCapelliSzafranek, BartholomaeusBartholomaeusSzafranekRhinow, DanielDanielRhinowMette, GersonGersonMetteSalg, PatrickPatrickSalgHermanns, Chistian FelixChistian FelixHermannsDey, BappadityaBappadityaDeyHalipre, LucLucHalipreTrivkovic, DarkoDarkoTrivkovicRincon Delgadillo, PaulinaPaulinaRincon DelgadilloMarschner, ThomasThomasMarschnerHalder, SandipSandipHalder2024-08-052023-10-302024-08-0520230277-786Xhttps://imec-publications.be/handle/20.500.12860/43033EUV mask defect inspection for the 3nm technology nodeProceedings paper