Beernaert, RoelRoelBeernaertPodprocky, TomasTomasPodprockyAvci, AykutAykutAvciDe Smet, JelleJelleDe SmetDe Smet, HerbertHerbertDe Smet2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14965Micromirror with electromechanical pulse width modulationProceedings paper