Yousif, M. Y. A.M. Y. A.YousifFriesel, M.M.FrieselWillander, M.M.WillanderLundgren, P.P.LundgrenCaymax, MattyMattyCaymax2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4964On the performance of in situ B-doped P+ poly-Si1-xGex gate material for nanometer scale MOSJournal article