Two-dimensional carrier profiling in advanced devices with pico-meter resolution

Vandervorst, WilfriedWilfriedVandervorstAlvarez, DavidDavidAlvarezEyben, PierrePierreEybenFouchier, MarcMarcFouchierHartwich, J.J.HartwichSlesazech, S.S.SlesazechVerheyen, PeterPeterVerheyenHogg, S.S.Hogg2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9819Two-dimensional carrier profiling in advanced devices with pico-meter resolutionProceedings paper