El Rifai, JoumanaJoumanaEl RifaiSedky, SherifSherifSedkyWasfi, RamiRamiWasfiVan Hoof, ChrisChrisVan HoofWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15264Laser-induced crystallization of SiGe MEMS structural layers deposited at temperatures below 250CProceedings paper